Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
© 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO 2 ) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Journal |
| Published: |
2017
|
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/42242 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Chiang Mai University |
| id |
th-cmuir.6653943832-42242 |
|---|---|
| record_format |
dspace |
| spelling |
th-cmuir.6653943832-422422017-09-28T04:25:58Z Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method Sansongsiri S. Thongtem S. © 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO 2 ) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,000 pulses and the anatase film thickness was 13.0-37.5 nm. In this research, the roughness was increased with the increasing in the number of deposition pulses and film thickness. The transmission at 600 nm wavelength was 65-85%, decreasing with the film thickness, and the optical energy gap was in the range of 3.55-3.65 eV. 2017-09-28T04:25:58Z 2017-09-28T04:25:58Z 2016-01-01 Journal 12299162 2-s2.0-85013272368 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/42242 |
| institution |
Chiang Mai University |
| building |
Chiang Mai University Library |
| country |
Thailand |
| collection |
CMU Intellectual Repository |
| description |
© 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO 2 ) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,000 pulses and the anatase film thickness was 13.0-37.5 nm. In this research, the roughness was increased with the increasing in the number of deposition pulses and film thickness. The transmission at 600 nm wavelength was 65-85%, decreasing with the film thickness, and the optical energy gap was in the range of 3.55-3.65 eV. |
| format |
Journal |
| author |
Sansongsiri S. Thongtem S. |
| spellingShingle |
Sansongsiri S. Thongtem S. Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| author_facet |
Sansongsiri S. Thongtem S. |
| author_sort |
Sansongsiri S. |
| title |
Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| title_short |
Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| title_full |
Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| title_fullStr |
Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| title_full_unstemmed |
Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| title_sort |
structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method |
| publishDate |
2017 |
| url |
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/42242 |
| _version_ |
1681422152034680832 |