Development of procedures for programmable proximity aperture lithography
Programmable proximity aperture lithography (PPAL) with MeV ions has been used in Jyväskylä and Chiang Mai universities for a number of years. Here we describe a number of innovations and procedures that have been incorporated into the LabView-based software. The basic operation involves the coordin...
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| Main Authors: | , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84879082989&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48105 |
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| Institution: | Chiang Mai University |