Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering

• Main Authors: Tohsophon T., Wattanasupinyo N., Silskulsuk B., Sirikulrat N.
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2014
• 在線閱讀: http://www.scopus.com/inward/record.url?eid=2-s2.0-80755175357&partnerID=40&md5=58ec666bb61e78bc68723262f8314f60; http://cmuir.cmu.ac.th/handle/6653943832/5984
• 機構: Chiang Mai University

Aluminum and indium co-doped zinc oxide (AIZO) thin films were prepared by direct current (dc) magnetron sputtering on glass substrate in pure argon atmosphere. Three inches of zinc oxide ceramic with 0.5 wt.% of aluminum and indium doping was used as a target in static mode. The influence of sputte...