Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering
Aluminum and indium co-doped zinc oxide (AIZO) thin films were prepared by direct current (dc) magnetron sputtering on glass substrate in pure argon atmosphere. Three inches of zinc oxide ceramic with 0.5 wt.% of aluminum and indium doping was used as a target in static mode. The influence of sputte...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-80755175357&partnerID=40&md5=58ec666bb61e78bc68723262f8314f60 http://cmuir.cmu.ac.th/handle/6653943832/5984 |
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| Institution: | Chiang Mai University |
| Language: | English |