Method to form MOS transistors with shallow junctions using laser annealing

by CHONG, YUNG FU, PEY, KIN LEONG, SEE, ALEX, WEE, ANDREW THYE SHEN
Published 2012

Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

by SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS, LEE, JAMES, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
Published 2012

Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

by SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS YOUG WEE, LEE, JAMES YONG MENG, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
Published 2012

Effect of processing parameters on electroless Cu seed layer properties

by Chen, Z., Chan, L., See, Alex K. H., Law, S. B., Zeng, K. Y., Shen, L., Tee, K. C., Ee, Elden Yong Chiang
Published 2012