OPTICAL PROPERTY STUDY OF GaN THIN FILMS GROWN BY UNBALANCED MAGNETRON DC SPUTTERING METHOD
<p align="justify">The Gallium Nitrida (GaN) thin films have been grown onto (0001) sapphire substrate by Unbalanced Magnetron DC Sputtering Method. The range of deposition temperature was 630-740oC, and Argon and Nitrogen gas of flow rates were witted. Study of optical properties of...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/11006 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |