STUDI LANJUT FABRIKASI WAFER SILOCON-ON- INSULATOR (SOP) DENGAN METODE EPITAXIAL LAYER-TRANSFER (ELTRAN)
<b>Abstract:<p align="justify"> <br /> <br /> SOI wafer was prepared using Epitaxial-Layer-Transfer (SOI) method which involved several processes, i.e. : synthesis of porous silicon, epitaxial growth, oxidation, wafer bonding and etching process. The lattice expa...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/4899 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |