Effect of Deposition Angle on Diamond-like Carbon Films on Silicon Trenches: A Molecular Dynamics Study

• Main Authors: Acero, Alejandro Joaquin A., Mahinay, Christian Lorenz S, Dela Cruz, Catherine Joy M
• Format: text
• Published: Archīum Ateneo 2025
• Subjects: Diamond-like carbon; Molecular dynamics simulations; Atomic, Molecular and Optical Physics; Physical Sciences and Mathematics; Physics
• Online Access: https://archium.ateneo.edu/physics-faculty-pubs/188
• Institution: Ateneo De Manila University

Known for its exceptional mechanical properties, diamond-like carbon (DLC) serves as an effective coating capable of improving a material’s performance in a variety of applications. While difficult to produce and analyze experimentally, molecular dynamics simulations serve as a sufficient method by...