White light interferometer with color CCD for 3D-surface profiling of microsystems

• المؤلفون الرئيسيون: Upputuri, Paul Kumar, Pramanik, Manojit, Nandigana, Krishna Mohan, Kothiyal, Mahendra Prasad
• مؤلفون آخرون: School of Chemical and Biomedical Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2015
• الموضوعات: DRNTU::Science::Chemistry::Physical chemistry
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/106899; http://hdl.handle.net/10220/25224

White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry....