White light interferometer with color CCD for 3D-surface profiling of microsystems

• Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit, Nandigana, Krishna Mohan, Kothiyal, Mahendra Prasad
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2015
• Subjects: DRNTU::Science::Chemistry::Physical chemistry
• Online Access: https://hdl.handle.net/10356/106899; http://hdl.handle.net/10220/25224
• Institution: Nanyang Technological University

White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry....