Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy

To meet various physical property requirements of materials for advanced applications for specific devices, combinations of Si/Ge, Ge/Si, Si1-xGex/Si, are frequently introduced in the device fabrication process. Epitaxy, condensation and annealing processes are commonly used. Since a small variation...

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Main Authors: Yoo, Woo Sik, Kang, Kitaek, Ueda, Takeshi, Ishigaki, Toshikazu, Nishigaki, Hiroshi, Hasuike, Noriyuki, Harima, Hiroshi, Yoshimoto, Masahiro, Tan, Chuan Seng
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2015
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Online Access:https://hdl.handle.net/10356/106992
http://hdl.handle.net/10220/25240
http://dx.doi.org/10.1149/2.0041502jss
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1069922019-12-06T22:22:38Z Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy Yoo, Woo Sik Kang, Kitaek Ueda, Takeshi Ishigaki, Toshikazu Nishigaki, Hiroshi Hasuike, Noriyuki Harima, Hiroshi Yoshimoto, Masahiro Tan, Chuan Seng School of Electrical and Electronic Engineering DRNTU::Science::Physics::Atomic physics::Solid state physics To meet various physical property requirements of materials for advanced applications for specific devices, combinations of Si/Ge, Ge/Si, Si1-xGex/Si, are frequently introduced in the device fabrication process. Epitaxy, condensation and annealing processes are commonly used. Since a small variation in composition, strain and crystallinity can result in reduced device performance or failure, the composition, strain and crystallinity must be carefully monitored and controlled throughout the manufacturing process. We have studied the dependence of Ge and Si intermixing on annealing temperature and Raman excitation wavelength. Using multiwavelength Raman spectroscopy, we found Ge and Si intermixing in epitaxially grown Ge(100)/Si(100) after successive thermal anneals. Very strong dependence of signal-to-noise (S/N) ratio measurements on excitation wavelength and film structure was observed. Suitable excitation wavelengths must be chosen to properly characterize Si and Ge-based heteroepitaxial layers based on the thickness, stacking order and composition of epitaxial films having different optical properties at different wavelengths. Published version 2015-03-12T02:42:39Z 2019-12-06T22:22:38Z 2015-03-12T02:42:39Z 2019-12-06T22:22:38Z 2014 2014 Journal Article Yoo, W. S., Kang, K., Ueda, T., Ishigaki, T., Nishigaki, H., Hasuike, N., et al. (2014). Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy. ECS journal of solid state science and technology, 4(2), Pg 9-15. 2162-8769 https://hdl.handle.net/10356/106992 http://hdl.handle.net/10220/25240 http://dx.doi.org/10.1149/2.0041502jss en ECS journal of solid state science and technology © The Author(s) 2014. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License (CC BY, http://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse of the work in any medium, provided the original work is properly cited. 7 p. application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Science::Physics::Atomic physics::Solid state physics
spellingShingle DRNTU::Science::Physics::Atomic physics::Solid state physics
Yoo, Woo Sik
Kang, Kitaek
Ueda, Takeshi
Ishigaki, Toshikazu
Nishigaki, Hiroshi
Hasuike, Noriyuki
Harima, Hiroshi
Yoshimoto, Masahiro
Tan, Chuan Seng
Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy
description To meet various physical property requirements of materials for advanced applications for specific devices, combinations of Si/Ge, Ge/Si, Si1-xGex/Si, are frequently introduced in the device fabrication process. Epitaxy, condensation and annealing processes are commonly used. Since a small variation in composition, strain and crystallinity can result in reduced device performance or failure, the composition, strain and crystallinity must be carefully monitored and controlled throughout the manufacturing process. We have studied the dependence of Ge and Si intermixing on annealing temperature and Raman excitation wavelength. Using multiwavelength Raman spectroscopy, we found Ge and Si intermixing in epitaxially grown Ge(100)/Si(100) after successive thermal anneals. Very strong dependence of signal-to-noise (S/N) ratio measurements on excitation wavelength and film structure was observed. Suitable excitation wavelengths must be chosen to properly characterize Si and Ge-based heteroepitaxial layers based on the thickness, stacking order and composition of epitaxial films having different optical properties at different wavelengths.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Yoo, Woo Sik
Kang, Kitaek
Ueda, Takeshi
Ishigaki, Toshikazu
Nishigaki, Hiroshi
Hasuike, Noriyuki
Harima, Hiroshi
Yoshimoto, Masahiro
Tan, Chuan Seng
format Article
author Yoo, Woo Sik
Kang, Kitaek
Ueda, Takeshi
Ishigaki, Toshikazu
Nishigaki, Hiroshi
Hasuike, Noriyuki
Harima, Hiroshi
Yoshimoto, Masahiro
Tan, Chuan Seng
author_sort Yoo, Woo Sik
title Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy
title_short Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy
title_full Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy
title_fullStr Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy
title_full_unstemmed Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy
title_sort characterization of hetero-epitaxial ge films on si using multiwavelength micro-raman spectroscopy
publishDate 2015
url https://hdl.handle.net/10356/106992
http://hdl.handle.net/10220/25240
http://dx.doi.org/10.1149/2.0041502jss
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