Measurement of residual stress developed during advanced semiconductor packaging process

This research report provides a focused investigation and theoretical review of thermal mismatch induced residual stress in semiconductor assembly and the application of utilizing piezoresistive stress sensor to conduct nondestructive measurement of such stress. In semiconductor fabrication process...

Full description

Saved in:
Bibliographic Details
Main Author: Huang, Guanbo.
Other Authors: Zhong Zhaowei
Format: Final Year Project
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/17302
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-17302
record_format dspace
spelling sg-ntu-dr.10356-173022023-03-04T18:16:08Z Measurement of residual stress developed during advanced semiconductor packaging process Huang, Guanbo. Zhong Zhaowei School of Mechanical and Aerospace Engineering A*STAR Institute of Microelectronics Kumar Aditya DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging This research report provides a focused investigation and theoretical review of thermal mismatch induced residual stress in semiconductor assembly and the application of utilizing piezoresistive stress sensor to conduct nondestructive measurement of such stress. In semiconductor fabrication process, these residual stresses are inevitable and capable of causing chip crack or delamination, thereby result in the loss of the chip functions as will as the damage of the package structure. Hence monitoring the residual stress plays an important role for determining the material suitable for the process and the critical process parameters. By embedding the piezoresistive stress sensor in the chip, residual stresses caused resistance shifts were recorded after die attachment process, chip encapsulation process, and several wafer level fabrication process such as UBM, solder bumping and dry film for 3 different silicon thicknesses (100um, 200um and 400um). Using the appropriate theoretical equations and the obtained piezoresistive coefficients, the residual stresses on the chip surface have been derived from the raw resistance data. Discussion deals with explaining the several critical stages of the residual stress development using some mechanical models. The measured residual stresses were plotted versus the chip thickness for die attachment process, chip encapsulation process. And it was found that the obtained trend matches with that derived from Stoney Equation using the bow measured from the silicon assembly. Bachelor of Engineering (Mechanical Engineering) 2009-06-05T06:31:45Z 2009-06-05T06:31:45Z 2009 2009 Final Year Project (FYP) http://hdl.handle.net/10356/17302 en Nanyang Technological University 94 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Huang, Guanbo.
Measurement of residual stress developed during advanced semiconductor packaging process
description This research report provides a focused investigation and theoretical review of thermal mismatch induced residual stress in semiconductor assembly and the application of utilizing piezoresistive stress sensor to conduct nondestructive measurement of such stress. In semiconductor fabrication process, these residual stresses are inevitable and capable of causing chip crack or delamination, thereby result in the loss of the chip functions as will as the damage of the package structure. Hence monitoring the residual stress plays an important role for determining the material suitable for the process and the critical process parameters. By embedding the piezoresistive stress sensor in the chip, residual stresses caused resistance shifts were recorded after die attachment process, chip encapsulation process, and several wafer level fabrication process such as UBM, solder bumping and dry film for 3 different silicon thicknesses (100um, 200um and 400um). Using the appropriate theoretical equations and the obtained piezoresistive coefficients, the residual stresses on the chip surface have been derived from the raw resistance data. Discussion deals with explaining the several critical stages of the residual stress development using some mechanical models. The measured residual stresses were plotted versus the chip thickness for die attachment process, chip encapsulation process. And it was found that the obtained trend matches with that derived from Stoney Equation using the bow measured from the silicon assembly.
author2 Zhong Zhaowei
author_facet Zhong Zhaowei
Huang, Guanbo.
format Final Year Project
author Huang, Guanbo.
author_sort Huang, Guanbo.
title Measurement of residual stress developed during advanced semiconductor packaging process
title_short Measurement of residual stress developed during advanced semiconductor packaging process
title_full Measurement of residual stress developed during advanced semiconductor packaging process
title_fullStr Measurement of residual stress developed during advanced semiconductor packaging process
title_full_unstemmed Measurement of residual stress developed during advanced semiconductor packaging process
title_sort measurement of residual stress developed during advanced semiconductor packaging process
publishDate 2009
url http://hdl.handle.net/10356/17302
_version_ 1759856774098190336