Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices

• Main Authors: Zhao, Xinghai, Wu, Peng, Liu, Fei
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2024
• Subjects: Engineering; Silicon micromachining; Waveguide filter
• Online Access: https://hdl.handle.net/10356/175839
• Institution: Nanyang Technological University

This paper presents a wafer-scale silicon microfabrication technology for the sub-terahertz (sub-THz) waveguide device mass production. Based on the effective scheme, a WR-5 (140-220 GHz) straight rectangular waveguide and a WR-2.8 (260-400 GHz) rectangular waveguide bandpass filter are implemented...