Atomistic simulation of EELS of SiON/Si interface and SiON breakdown

• Main Author: Wang, Zhongrui.
• Other Authors: Pey Kin Leong
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/17925
• Institution: Nanyang Technological University

Electron Energy Loss Spectroscopy (EELS) is the statistical observation of energy loss of the emitted electrons from Transmission Electron Microscope (TEM). The electron beam undergoes a many-body scattering process with nucleus and electrons of the specimen. The electrons energy loss spectrum which...