Atomistic simulation of EELS of SiON/Si interface and SiON breakdown

• المؤلف الرئيسي: Wang, Zhongrui.
• مؤلفون آخرون: Pey Kin Leong
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2009
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/17925
• المؤسسة: Nanyang Technological University

Electron Energy Loss Spectroscopy (EELS) is the statistical observation of energy loss of the emitted electrons from Transmission Electron Microscope (TEM). The electron beam undergoes a many-body scattering process with nucleus and electrons of the specimen. The electrons energy loss spectrum which...