Atomistic simulation of EELS of SiON/Si interface and SiON breakdown

Electron Energy Loss Spectroscopy (EELS) is the statistical observation of energy loss of the emitted electrons from Transmission Electron Microscope (TEM). The electron beam undergoes a many-body scattering process with nucleus and electrons of the specimen. The electrons energy loss spectrum which...

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Bibliographic Details
Main Author: Wang, Zhongrui.
Other Authors: Pey Kin Leong
Format: Final Year Project
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/17925
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Institution: Nanyang Technological University
Language: English
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