Atomistic simulation of EELS of SiON/Si interface and SiON breakdown

• 主要作者: Wang, Zhongrui.
• 其他作者: Pey Kin Leong
• 格式: Final Year Project
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Electrical and electronic engineering
• 在線閱讀: http://hdl.handle.net/10356/17925

Electron Energy Loss Spectroscopy (EELS) is the statistical observation of energy loss of the emitted electrons from Transmission Electron Microscope (TEM). The electron beam undergoes a many-body scattering process with nucleus and electrons of the specimen. The electrons energy loss spectrum which...