Deposition of highly oriented diamond films by microwave plasma enhanced CVD

• المؤلف الرئيسي: Liao, Xiao Ning.
• مؤلفون آخرون: Jaeshin, Ahn
• التنسيق: Theses and Dissertations
• منشور في: 2010
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/39004

In this study, the deposition of {100} textured and highly oriented diamond films has been successfully realized. Investigation was conducted to clarify the influences of various parameters on the growth of {100} textured and highly oriented diamond films. Problems and the growth mechanisms of hi...