Deposition of highly oriented diamond films by microwave plasma enhanced CVD
In this study, the deposition of {100} textured and highly oriented diamond films has been successfully realized. Investigation was conducted to clarify the influences of various parameters on the growth of {100} textured and highly oriented diamond films. Problems and the growth mechanisms of hi...
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| Format: | Theses and Dissertations |
| Published: |
2010
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| Online Access: | http://hdl.handle.net/10356/39004 |
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| Institution: | Nanyang Technological University |