Optical coatings using filtered cathodic vacuum arc technique
The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments.
Saved in:
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Theses and Dissertations |
| 出版: |
2008
|
| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/4160 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Nanyang Technological University |