Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects

The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.

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Bibliographic Details
Main Author:	Goh, Tat Kean.
Other Authors:	Wong, Terence Kin Shun
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4303
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Institution:	Nanyang Technological University

Description
Summary:	The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.

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