Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects

The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.

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Bibliographic Details
Main Author:	Goh, Tat Kean.
Other Authors:	Wong, Terence Kin Shun
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4303
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4303
record_format	dspace
spelling	sg-ntu-dr.10356-43032023-07-04T15:58:08Z Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects Goh, Tat Kean. Wong, Terence Kin Shun School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects. Master of Engineering 2008-09-17T09:48:56Z 2008-09-17T09:48:56Z 2004 2004 Thesis http://hdl.handle.net/10356/4303 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Goh, Tat Kean. Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
description	The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.
author2	Wong, Terence Kin Shun
author_facet	Wong, Terence Kin Shun Goh, Tat Kean.
format	Theses and Dissertations
author	Goh, Tat Kean.
author_sort	Goh, Tat Kean.
title	Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
title_short	Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
title_full	Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
title_fullStr	Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
title_full_unstemmed	Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
title_sort	analysis of mesoporous ultra low k dielectric materials for microelectronic interconnects
publishDate	2008
url	http://hdl.handle.net/10356/4303
_version_	1772826322910838784

Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects

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