Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Theses and Dissertations |
Published: |
2008
|
Subjects: | |
Online Access: | http://hdl.handle.net/10356/4303 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
id |
sg-ntu-dr.10356-4303 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-43032023-07-04T15:58:08Z Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects Goh, Tat Kean. Wong, Terence Kin Shun School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects. Master of Engineering 2008-09-17T09:48:56Z 2008-09-17T09:48:56Z 2004 2004 Thesis http://hdl.handle.net/10356/4303 Nanyang Technological University application/pdf |
institution |
Nanyang Technological University |
building |
NTU Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NTU Library |
collection |
DR-NTU |
topic |
DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials |
spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Goh, Tat Kean. Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects |
description |
The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects. |
author2 |
Wong, Terence Kin Shun |
author_facet |
Wong, Terence Kin Shun Goh, Tat Kean. |
format |
Theses and Dissertations |
author |
Goh, Tat Kean. |
author_sort |
Goh, Tat Kean. |
title |
Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects |
title_short |
Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects |
title_full |
Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects |
title_fullStr |
Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects |
title_full_unstemmed |
Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects |
title_sort |
analysis of mesoporous ultra low k dielectric materials for microelectronic interconnects |
publishDate |
2008 |
url |
http://hdl.handle.net/10356/4303 |
_version_ |
1772826322910838784 |