Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects
The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4303 |
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| Institution: | Nanyang Technological University |