Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films

In this work, we propose a custom-designed inductively coupled plasma chemical vapor deposition (ICP-CVD) system as an alternative manufacturing approach for nanostructured materials.

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Bibliographic Details
Main Author:	Lee, Yi Chau.
Other Authors:	Tan, Ooi Kiang
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4588
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4588
record_format	dspace
spelling	sg-ntu-dr.10356-45882023-07-04T15:58:23Z Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films Lee, Yi Chau. Tan, Ooi Kiang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials In this work, we propose a custom-designed inductively coupled plasma chemical vapor deposition (ICP-CVD) system as an alternative manufacturing approach for nanostructured materials. Master of Engineering 2008-09-17T09:54:51Z 2008-09-17T09:54:51Z 2004 2004 Thesis http://hdl.handle.net/10356/4588 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Lee, Yi Chau. Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
description	In this work, we propose a custom-designed inductively coupled plasma chemical vapor deposition (ICP-CVD) system as an alternative manufacturing approach for nanostructured materials.
author2	Tan, Ooi Kiang
author_facet	Tan, Ooi Kiang Lee, Yi Chau.
format	Theses and Dissertations
author	Lee, Yi Chau.
author_sort	Lee, Yi Chau.
title	Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
title_short	Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
title_full	Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
title_fullStr	Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
title_full_unstemmed	Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
title_sort	inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
publishDate	2008
url	http://hdl.handle.net/10356/4588
_version_	1772825441160134656

Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films

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