Thermal stress analysis and characterization of thermo-mechanical properties of thin films on an elastic substrate

• 主要作者: Hu, YingYong
• 其他作者: Huang Weimin
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• 在線閱讀: https://hdl.handle.net/10356/46439
• 機構: Nanyang Technological University

Stress and thermomechanical behavior of thin films deposited atop a substrate upon thermal loading/unloading have been investigated extensively in the past decades, which was partially stimulated by the development of micro- and nanotechnology. However, most of the previous effort in analysis was fo...