Thermal stress analysis and characterization of thermo-mechanical properties of thin films on an elastic substrate
Stress and thermomechanical behavior of thin films deposited atop a substrate upon thermal loading/unloading have been investigated extensively in the past decades, which was partially stimulated by the development of micro- and nanotechnology. However, most of the previous effort in analysis was fo...
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Main Author: | Hu, YingYong |
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Other Authors: | Huang Weimin |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/46439 |
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Institution: | Nanyang Technological University |
Language: | English |
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