Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

• المؤلف الرئيسي: Wang, Chunmei
• مؤلفون آخرون: Li Chuan
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/5334
• المؤسسة: Nanyang Technological University

On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...