Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...

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Bibliographic Details
Main Author: Wang, Chunmei
Other Authors: Li Chuan
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/5334
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Institution: Nanyang Technological University

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https://hdl.handle.net/10356/5334

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