Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

• Main Author: Wang, Chunmei
• Other Authors: Li Chuan
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/5334
• Institution: Nanyang Technological University

On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...