Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...
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Main Author: | Wang, Chunmei |
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Other Authors: | Li Chuan |
Format: | Theses and Dissertations |
Published: |
2008
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/5334 |
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Institution: | Nanyang Technological University |
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