Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...

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Main Author: Wang, Chunmei
Other Authors: Li Chuan
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/5334
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-53342023-03-11T17:35:52Z Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films Wang, Chunmei Li Chuan Jang-Hsing Hsieh School of Mechanical and Aerospace Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or more presenting in nano-scale. In this study, Cu phase acting as the second phase was incorporated into TaN matrix in order to tune the negative TCR of TaN. Experimental results show that annealed TaN thin films have a negative TCR (-850 ppm/ºC) while Cu films would normally give a positive TCR (+4300 ppm/ºC). It seems rather natural that TaN-Cu nanocomposite could demonstrate a near-zero TCR and the experiment result show that when proper Cu concentrations reach to 66 at.%~75 at.%, a zero-TCR could be obtained. DOCTOR OF PHILOSOPHY (MAE) 2008-09-17T10:48:01Z 2008-09-17T10:48:01Z 2007 2007 Thesis Li, C. (2007). Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5334 10.32657/10356/5334 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Wang, Chunmei
Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
description On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or more presenting in nano-scale. In this study, Cu phase acting as the second phase was incorporated into TaN matrix in order to tune the negative TCR of TaN. Experimental results show that annealed TaN thin films have a negative TCR (-850 ppm/ºC) while Cu films would normally give a positive TCR (+4300 ppm/ºC). It seems rather natural that TaN-Cu nanocomposite could demonstrate a near-zero TCR and the experiment result show that when proper Cu concentrations reach to 66 at.%~75 at.%, a zero-TCR could be obtained.
author2 Li Chuan
author_facet Li Chuan
Wang, Chunmei
format Theses and Dissertations
author Wang, Chunmei
author_sort Wang, Chunmei
title Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
title_short Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
title_full Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
title_fullStr Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
title_full_unstemmed Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
title_sort electrical and mechanical properties of ta-n-cu nanocomposite thin films
publishDate 2008
url https://hdl.handle.net/10356/5334
_version_ 1761781894002769920

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