Influence of cleaning process on gate oxide integrity

The influence of cleaning process on GOI (Gate Oxide Integrity) is studied in the whole FEOL (Front End Of the Line) process loop.

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Bibliographic Details
Main Author:	Liu, Qing Guang.
Other Authors:	Prasad, Krishnamachar
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/4740
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4740
record_format	dspace
spelling	sg-ntu-dr.10356-47402023-07-04T16:00:01Z Influence of cleaning process on gate oxide integrity Liu, Qing Guang. Prasad, Krishnamachar School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics The influence of cleaning process on GOI (Gate Oxide Integrity) is studied in the whole FEOL (Front End Of the Line) process loop. Master of Science (Microelectronics) 2008-09-17T09:57:38Z 2008-09-17T09:57:38Z 2003 2003 Thesis http://hdl.handle.net/10356/4740 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Liu, Qing Guang. Influence of cleaning process on gate oxide integrity
description	The influence of cleaning process on GOI (Gate Oxide Integrity) is studied in the whole FEOL (Front End Of the Line) process loop.
author2	Prasad, Krishnamachar
author_facet	Prasad, Krishnamachar Liu, Qing Guang.
format	Theses and Dissertations
author	Liu, Qing Guang.
author_sort	Liu, Qing Guang.
title	Influence of cleaning process on gate oxide integrity
title_short	Influence of cleaning process on gate oxide integrity
title_full	Influence of cleaning process on gate oxide integrity
title_fullStr	Influence of cleaning process on gate oxide integrity
title_full_unstemmed	Influence of cleaning process on gate oxide integrity
title_sort	influence of cleaning process on gate oxide integrity
publishDate	2008
url	http://hdl.handle.net/10356/4740
_version_	1772826886116737024

Influence of cleaning process on gate oxide integrity

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