Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer

This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.

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Bibliographic Details
Main Author:	Lo, Chee Wai.
Other Authors:	Tse, Man Siu
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/4791
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4791
record_format	dspace
spelling	sg-ntu-dr.10356-47912023-07-04T16:49:47Z Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer Lo, Chee Wai. Tse, Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications. Master of Engineering 2008-09-17T09:58:47Z 2008-09-17T09:58:47Z 2002 2002 Thesis http://hdl.handle.net/10356/4791 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Lo, Chee Wai. Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
description	This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.
author2	Tse, Man Siu
author_facet	Tse, Man Siu Lo, Chee Wai.
format	Theses and Dissertations
author	Lo, Chee Wai.
author_sort	Lo, Chee Wai.
title	Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
title_short	Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
title_full	Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
title_fullStr	Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
title_full_unstemmed	Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
title_sort	characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
publishDate	2008
url	http://hdl.handle.net/10356/4791
_version_	1772826599509458944

Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer

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