Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer

• 主要作者: Lo, Chee Wai.
• 其他作者: Tse, Man Siu
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• 在線閱讀: http://hdl.handle.net/10356/4791

This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.