Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4791 |
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| Institution: | Nanyang Technological University |