Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer

• المؤلف الرئيسي: Lo, Chee Wai.
• مؤلفون آخرون: Tse, Man Siu
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/4791
• المؤسسة: Nanyang Technological University

This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.