Novel structures and materials for microelectromechanical system (MEMS) devices

In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.

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Bibliographic Details
Main Author:	Low, Duong Sin.
Other Authors:	Dowd, Philip
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:	http://hdl.handle.net/10356/4810
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4810
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spelling	sg-ntu-dr.10356-48102023-07-04T15:18:21Z Novel structures and materials for microelectromechanical system (MEMS) devices Low, Duong Sin. Dowd, Philip School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices. Master of Engineering 2008-09-17T09:59:09Z 2008-09-17T09:59:09Z 2002 2002 Thesis http://hdl.handle.net/10356/4810 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Low, Duong Sin. Novel structures and materials for microelectromechanical system (MEMS) devices
description	In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.
author2	Dowd, Philip
author_facet	Dowd, Philip Low, Duong Sin.
format	Theses and Dissertations
author	Low, Duong Sin.
author_sort	Low, Duong Sin.
title	Novel structures and materials for microelectromechanical system (MEMS) devices
title_short	Novel structures and materials for microelectromechanical system (MEMS) devices
title_full	Novel structures and materials for microelectromechanical system (MEMS) devices
title_fullStr	Novel structures and materials for microelectromechanical system (MEMS) devices
title_full_unstemmed	Novel structures and materials for microelectromechanical system (MEMS) devices
title_sort	novel structures and materials for microelectromechanical system (mems) devices
publishDate	2008
url	http://hdl.handle.net/10356/4810
_version_	1772825557738717184

Novel structures and materials for microelectromechanical system (MEMS) devices

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