Novel structures and materials for microelectromechanical system (MEMS) devices
In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4810 |
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| Institution: | Nanyang Technological University |