Novel structures and materials for microelectromechanical system (MEMS) devices

• Main Author: Low, Duong Sin.
• Other Authors: Dowd, Philip
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/4810
• Institution: Nanyang Technological University

In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.