ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

Zinc oxide (ZnO) thin film piezoelectric microelectromechanical systems (MEMS) based vibration energy harvesters with two different designs are presented. These harvesters consist of a silicon cantilever, a silicon proof mass, and a ZnO piezoelectric layer. Design I has a large ZnO piezoelectric ele...

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Bibliographic Details
Main Authors: Wang, Peihong, Du, Hejun
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2015
Online Access:https://hdl.handle.net/10356/83659
http://hdl.handle.net/10220/39161
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Institution: Nanyang Technological University
Language: English