ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

• Main Authors: Wang, Peihong, Du, Hejun
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2015
• Online Access: https://hdl.handle.net/10356/83659; http://hdl.handle.net/10220/39161
• Institution: Nanyang Technological University

Zinc oxide (ZnO) thin film piezoelectric microelectromechanical systems (MEMS) based vibration energy harvesters with two different designs are presented. These harvesters consist of a silicon cantilever, a silicon proof mass, and a ZnO piezoelectric layer. Design I has a large ZnO piezoelectric ele...