ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance
Zinc oxide (ZnO) thin film piezoelectric microelectromechanical systems (MEMS) based vibration energy harvesters with two different designs are presented. These harvesters consist of a silicon cantilever, a silicon proof mass, and a ZnO piezoelectric layer. Design I has a large ZnO piezoelectric ele...
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2015
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| Online Access: | https://hdl.handle.net/10356/83659 http://hdl.handle.net/10220/39161 |
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| Institution: | Nanyang Technological University |
| Language: | English |