Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography
In this paper, we report a novel concept and methodology to fabricate high resolution periodic features using i-line laser source and multiple converging lenses. This configuration reduces the number of optical elements by employing a converging two-lens system to direct the beams on to the sample i...
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/85691 http://hdl.handle.net/10220/16599 |
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| Institution: | Nanyang Technological University |
| Language: | English |