Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography
In this paper, we report a novel concept and methodology to fabricate high resolution periodic features using i-line laser source and multiple converging lenses. This configuration reduces the number of optical elements by employing a converging two-lens system to direct the beams on to the sample i...
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Main Authors: | Murukeshan, V. M., Sidharthan Raghuraman. |
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Other Authors: | School of Mechanical and Aerospace Engineering |
Format: | Article |
Language: | English |
Published: |
2013
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Online Access: | https://hdl.handle.net/10356/85691 http://hdl.handle.net/10220/16599 |
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Institution: | Nanyang Technological University |
Language: | English |
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