Fracture toughness measurement of thin films on compliant substrate using controlled buckling test

• Main Authors: Chen, Zhong, Gan, Zhenghao
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/94153; http://hdl.handle.net/10220/8202
• Institution: Nanyang Technological University

Thin films and multilayered structures are increasingly used in the industry. One of the important mechanical properties of these thin layers is the fracture toughness, which may be quite different from the known value of the bulk sample due to microstructural difference. In the design towards devic...