The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects
In this study, numerical work using ANSYS and analytical work based on Eshelby models were performed to examine the effect of aspect ratio scaling on the hydrostatic stress in passivated metal interconnects. Aluminium and copper interconnects passivated with phosphosilicate glass (PSG) with aspect r...
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sg-ntu-dr.10356-942462023-07-14T15:57:26Z The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects Ang, Derrick Wong, Chee C. Ramanujan, Raju V. School of Materials Science & Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects In this study, numerical work using ANSYS and analytical work based on Eshelby models were performed to examine the effect of aspect ratio scaling on the hydrostatic stress in passivated metal interconnects. Aluminium and copper interconnects passivated with phosphosilicate glass (PSG) with aspect ratios ranging from 1 × 10− 4 to 100 were studied. Copper interconnects in damascene structure were also studied. The results from analytical models agreed well with numerical results and relevant experimental results. The results showed a decreasing trend of hydrostatic stress with aspect ratio for narrow interconnects, and increasing trend of hydrostatic stress for wide interconnects, with a maximum hydrostatic stress at an aspect ratio of 1. It was observed that there is a large scaling effect. For example, in the case of aluminium interconnect, stress values vary between 50 MPa and 463 MPa. It was also observed from the hydrostatic stress contours that the regions of highest stress do not correspond to the void locations seen experimentally. This implies that it is insufficient to look only at hydrostatic stress for determination of failure sites. Another factor that should be examined is the stress gradient. Accepted version 2011-10-13T01:40:28Z 2019-12-06T18:53:11Z 2011-10-13T01:40:28Z 2019-12-06T18:53:11Z 2006 2006 Journal Article Ang, D., Wong, C. C., & Ramanujan, R. V. (2007). The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects. Thin Solid Films, 515, 3246-3252. 0040-6090 https://hdl.handle.net/10356/94246 http://hdl.handle.net/10220/7256 10.1016/j.tsf.2006.01.053 143646 en Thin solid films © 2006 Elsevier. This is the author created version of a work that has been peer reviewed and accepted for publication by Materials Science and Engineering A, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI: http://dx.doi.org/10.1016/j.tsf.2006.01.053] 7 p. application/pdf |
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DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects Ang, Derrick Wong, Chee C. Ramanujan, Raju V. The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
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In this study, numerical work using ANSYS and analytical work based on Eshelby models were performed to examine the effect of aspect ratio scaling on the hydrostatic stress in passivated metal interconnects. Aluminium and copper interconnects passivated with phosphosilicate glass (PSG) with aspect ratios ranging from 1 × 10− 4 to 100 were studied. Copper interconnects in damascene structure were also studied. The results from analytical models agreed well with numerical results and relevant experimental results. The results showed a decreasing trend of hydrostatic stress with aspect ratio for narrow interconnects, and increasing trend of hydrostatic stress for wide interconnects, with a maximum hydrostatic stress at an aspect ratio of 1. It was observed that there is a large scaling effect. For example, in the case of aluminium interconnect, stress values vary between 50 MPa and 463 MPa. It was also observed from the hydrostatic stress contours that the regions of highest stress do not correspond to the void locations seen experimentally. This implies that it is insufficient to look only at hydrostatic stress for determination of failure sites. Another factor that should be examined is the stress gradient. |
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School of Materials Science & Engineering |
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School of Materials Science & Engineering Ang, Derrick Wong, Chee C. Ramanujan, Raju V. |
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Article |
author |
Ang, Derrick Wong, Chee C. Ramanujan, Raju V. |
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Ang, Derrick |
title |
The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
title_short |
The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
title_full |
The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
title_fullStr |
The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
title_full_unstemmed |
The effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
title_sort |
effect of aspect ratio scaling on hydrostatic stress in passivated interconnects |
publishDate |
2011 |
url |
https://hdl.handle.net/10356/94246 http://hdl.handle.net/10220/7256 |
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1773551233196359680 |