Study of low-temperature thermocompression bonding in Ag-In solder for packaging applications
Low-temperature solders have wide applications in integrated circuits and micro-electromechanical systems packaging. In this article, a study on Ag-In solder for chip-to-chip thermocompression bonding was carried out. The resulting joint consists of AgIn2 and Ag9In4 phases, with the latter...
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/94437 http://hdl.handle.net/10220/7261 |
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Institution: | Nanyang Technological University |
Language: | English |
Summary: | Low-temperature solders have wide applications in integrated circuits and
micro-electromechanical systems packaging. In this article, a study on Ag-In
solder for chip-to-chip thermocompression bonding was carried out. The
resulting joint consists of AgIn2 and Ag9In4 phases, with the latter phase
having a melting temperature higher than 400 C. Complete consumption of In
solder into a Ag-rich intermetallic compound is achieved by applying a bond
pressure of 1.4 MPa at 180 C for 40 min. We also observe that the bonding
pressure effect enables a Ag-rich phase to be formed within a shorter bonding
duration (10 min) at a higher pressure of 1.6 MPa. Finally, prolonged aging
leads to the formation of the final phase of Ag9In4 in the bonded joints. |
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