Fabrication of sub-50-nm solid-state nanostructures on the basis of dip-pen nanolithography

• Main Authors: Mirkin, Chad A., Zhang, Hua, Chung, Sung-Wook
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials
• Online Access: https://hdl.handle.net/10356/95377; http://hdl.handle.net/10220/8574
• Institution: Nanyang Technological University

The fabrication of arrays of sub-50-nm gold dots and line structures with deliberately designed 12−100-nm gaps is reported. These structures were made by initially using dip-pen nanolithography to pattern the etch resist, 16-mercaptohexadecanoic acid, on Au/Ti/SiOx/Si substrates and then using wet-c...