Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane

Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane

10.1063/1.1519734

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Bibliographic Details
Main Authors: Price, R.W., Tok, E.S., Woods, N.J., Zhang, J.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107055
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Institution: National University of Singapore
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Summary:10.1063/1.1519734

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