Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane

10.1063/1.1519734

Saved in:

Bibliographic Details
Main Authors:	Price, R.W., Tok, E.S., Woods, N.J., Zhang, J.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/107055
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-107055
record_format	dspace
spelling	sg-nus-scholar.10635-1070552023-10-27T08:21:21Z Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. MATERIALS SCIENCE 10.1063/1.1519734 Applied Physics Letters 81 20 3780-3782 APPLA 2014-10-29T08:38:53Z 2014-10-29T08:38:53Z 2002-11-11 Article Price, R.W., Tok, E.S., Woods, N.J., Zhang, J. (2002-11-11). Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane. Applied Physics Letters 81 (20) : 3780-3782. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1519734 00036951 http://scholarbank.nus.edu.sg/handle/10635/107055 000179042200026 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1519734
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Price, R.W. Tok, E.S. Woods, N.J. Zhang, J.
format	Article
author	Price, R.W. Tok, E.S. Woods, N.J. Zhang, J.
spellingShingle	Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
author_sort	Price, R.W.
title	Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
title_short	Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
title_full	Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
title_fullStr	Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
title_full_unstemmed	Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
title_sort	growth dynamics of si1-ycy and si1-x-ygexcy on si(001) surface from disilane, germane, and methylsilane
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/107055
_version_	1781788330233430016

Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane

Similar Items